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Conferences

Patterned Defect & CD Metrology by TSOM Beyond the 22 nm Node

Author(s)
Ravikiran Attota, Abraham Arceo, Benjamin Bunday, Victor Vertanian
Through-focus scanning optical microscopy (TSOM) is a novel method [1-8] that allows conventional optical microscopes to collect dimensional information down to

On CD-AFM bias related to probe bending

Author(s)
Vladimir A. Ukraintsev, Ndubuisi George Orji, Theodore V. Vorburger, Ronald G. Dixson, Joseph Fu, Richard M. Silver
Critical Dimension AFM (CD-AFM) is a widely used reference metrology. To characterize modern semiconductor devices, very small and flexible probes, often 15 nm

OVERVIEW OF THE TESTING PROGRAM ON FIBERS USED IN BALLISTIC APPLICATIONS

Author(s)
Amanda L. Forster, Haruki Kobayashi, Jae H. Kim, Michael A. Riley, Joy Dunkers, Scott Wight, Kirk D. Rice, Gale A. Holmes
The goal of this paper and presentation is to give an overview of the research effort to date being conducted at the National Institute of Standards and

Modeling for Optimal Ambulance Patient Compartment Layout

Author(s)
Deogratias Kibira, Yung-Tsun Lee, Mehdi Dadfarnia
This paper describes how modeling and simulation can play a major role in developing standards recommendations for patient compartment layout of automotive

SEM imaging of ultra-high aspect ratio hole features

Author(s)
John S. Villarrubia, Aron Cepler, Benjamin D. Bunday, Bradley Thiel
In-line, non-destructive process control metrology of high aspect ratio (HAR) holes and trenches has long been a known gap in metrology. Imaging the bottoms of

Modeling for Optimal Ambulance Patient Compartment Layout

Author(s)
Deogratias Kibira, Yung-Tsun T. Lee, Mehdi Dadfarnia
This paper describes how modeling and simulation can play a major role in developing standards recommendations for patient compartment layout of automotive

In Situ Raman Monitoring of Ring-Opening Copolymerizations

Author(s)
Matthew T. Hunley, Santanu S. Kundu, Peter M. Johnson, Kathryn Beers
Recent advances in enzyme, metal, and organic catalysts have enabled the development of advanced functional polymers from cyclic ester and cyclic carbonate

Infrared detector calibrations

Author(s)
George P. Eppeldauer, Vyacheslav B. Podobedov
An InSb working standard radiometer, first calibrated at NIST in 1999 against a cryogenic bolometer, was recently calibrated against a newly developed low-NEP

Functional Requirements of a Model for Kitting Plans

Author(s)
Stephen B. Balakirsky, Zeid Kootbally, Thomas R. Kramer, Rajmohan Madhavan, Craig I. Schlenoff, Michael O. Shneier
Industrial assembly of manufactured products is often performed by first bringing parts together in a kit and then moving the kit to the assembly area where the
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