Silver, R.
, Qin, J.
, Barnes, B.
, Zhou, H.
, Dixson, R.
and Goasmat, F.
(2012),
Phase sensitive parametric optical metrology: Exploring the limits of 3-dimensional optical metrology, Proceedings of the SPIE, San Jose, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911039
(Accessed November 5, 2024)