@conference{37606,
  author = {Richard Silver and Jing Qin and Bryan Barnes and Hui Zhou and Ronald Dixson and Francois Goasmat},
  title = {Phase sensitive parametric optical metrology: Exploring the limits of 3-dimensional optical metrology},
  year = {2012},
  number = {8324},
  month = {2012-04-04},
  publisher = {Proceedings of the SPIE, San Jose, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911039},
  language = {en},
}