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Conferences

The evaluation of photo/e-beam complementary grayscale lithography for high topography 3D structure

March 29, 2013

Author(s)

Liya Yu, Richard J. Kasica, Robert D. Newby, Lei Chen, Vincent K. Luciani

This article demonstrates and evaluates photo/e-beam grayscale complementary lithography processes for the fabrication of large area, high topography grayscale

The MEMS 5-in-1 Test Chips (Reference Materials 8096 and 8097)

March 27, 2013

Author(s)

Janet M. Cassard, Jon C. Geist, Craig D. McGray, Richard A. Allen, Muhammad Y. Afridi, Brian J. Nablo, Michael Gaitan, David G. Seiler

This paper presents an overview of the Microelectromechanical Systems (MEMS) 5-in-1 Reference Material (RM), which is a single test chip with test structures

Metrology For Organic Monolayers On Cobalt Surfaces

March 27, 2013

Author(s)

Sujitra J. Pookpanratana, Leigh K. Lydecker, Hyuk-Jae Jang, Curt A. Richter, Christina A. Hacker

Computational Fluid Dynamic (CFD) Investigation of NISTs Scale Model Smokestack Simulator

March 27, 2013

Author(s)

Aaron N. Johnson, Jacob E. Ricker, Joey T. Boyd

Accurate flow measurements are essential to quantifying the amount of greenhouse gases (GHGs) and other pollutants emitted from the smokestacks of coal-fired

Developing Standards for Commercial Electric Vehicle Fueling and Submetering

March 27, 2013

Author(s)

Marc A. Buttler

NIST plays a role in the development of standards for commercial measuring systems that are used in legal metrology in the U.S. NIST Handbook 130 and NIST

Frontiers of Characterization and Metrology for Nanoelectronics: 2013

March 26, 2013

Author(s)

Erik M. Secula, David G. Seiler

Accuracy and Resolution of Nanoscale Strain Measurement Techniques

March 26, 2013

Author(s)

William A. Osborn, Lawrence H. Friedman, Mark D. Vaudin, Stephan J. Stranick, Michael S. Gaither, Justin M. Gorham, Victor H. Vartanian, Robert F. Cook

Measurement Uncertainties in MEMS Kinematics by Super-Resolution Fluorescence Microscopy

March 25, 2013

Author(s)

Craig D. McGray, Samuel M. Stavis, Jon C. Geist

Charge-Based Capacitance Measurements Circuits for Interface With Atomic Force Microscope Probes

March 25, 2013

Author(s)

Joseph J. Kopanski, Muhammad Y. Afridi, Chong Jiang, Michael Lorek, Timothy Kohler, Curt A. Richter

The charge based capacitance measurement (CBCM) technique is highly sensitive to small capacitances and capable integration of onto an AFM tip, thereby reducing

Quantitative Characterization and Applications of A 193 nm Scatterfield Microscope

March 25, 2013

Author(s)

Martin Y. Sohn, Bryan M. Barnes, Richard M. Silver

With decreasing feature sizes in semiconductor manufacturing, there is an acute demand for measurements of both critical dimensions (CD) and defects on the

SCATTERFIELD MICROSCOPY, REVIEW OF TECHNIQUES THAT PUSH THE FUNDAMENTAL LIMITS OF OPTICAL DEFECT METROLOGY

March 25, 2013

Author(s)

Richard M. Silver, Bryan M. Barnes, Francois R. Goasmat, Hui Zhou, Martin Y. Sohn

The semiconductor manufacturing industry is now facing serious challenges in achieving defect detection rates with acceptable throughput and accuracy. With

Spatially-Resolved Dopant Characterization with a Scanning Microwave Microscope

March 25, 2013

Author(s)

Thomas M. Wallis, Atif A. Imtiaz, Alexandra E. Curtin, Pavel Kabos, Matthew D. Brubaker, Norman A. Sanford, Kristine A. Bertness

The scanning microwave microscope (SMM) is a tool for spatially-resolved microwave characterization of nanoelectronic materials and devices. The microscope

3-D Optical Metrology of Finite sub-20 nm Dense Arrays using Fourier Domain Normalization

March 25, 2013

Author(s)

Jing Qin, Hui Zhou, Bryan M. Barnes, Ronald G. Dixson, Richard M. Silver

Reduced target dimensions requiring improved resolution and sensitivity have driven the need to use and analyze the phase and scattered frequency information

Combinatorial Coverage Measurement Concepts and Applications

March 22, 2013

Author(s)

David R. Kuhn, Itzel (. Dominquez Mendoza, Raghu N. Kacker, Yu Lei

Empirical data demonstrate the value of t-way coverage, but in some testing situations, it is not practical to use covering arrays. However any set of tests

ACTS: A Combinatorial Test Generation Tool

March 22, 2013

Author(s)

Raghu N. Kacker

In this paper, we introduce a combinatorial test generation tool called Advanced Combinatorial Testing System (or ACTS). ACTS supports t-way combinatorial test

Concept Analysis to Enrich Manufacturing Service Capability Models

March 22, 2013

Author(s)

Jun H. Shin, Boonserm Kulvatunyou, Yunsu Lee, Nenad Ivezic

When an Original Equipment Manufacturer (OEM), which makes a final product for the consumer marketplace by purchasing components from its suppliers, faces

Requirements Analysis for Safer Ambulance Patient Compartments

March 22, 2013

Author(s)

Mehdi Dadfarnia, Yung-Tsun T. Lee, Allison Barnard Feeney, Deogratias Kibira

Providing emergency care services in the confined space of the patient compartment of a moving ambulance is a hazardous activity. A National Institute of

An Input Space Modeling Methodology for Combinatorial Testing

March 22, 2013

Author(s)

Mehra N. Borazjany, Laleh Ghandehari, Yu Lei, Raghu N. Kacker, D. Richard Kuhn

The input space of a system must be modeled before combinatorial testing can be applied to this system. The effectiveness of combinatorial testing to a large

Applying Combinatorial Testing to the Siemens Suite

March 22, 2013

Author(s)

Laleh Ghandehari, Mehra N. Borazjany, Yu Lei, Raghu N. Kacker, D. Richard Kuhn

Combinatorial testing has attracted a lot of attention from both industry and academia. A number of reports suggest that combinatorial testing can be effective

Integrating carbon nanotubes as vias in a monolithic 3DIC process

March 21, 2013

Author(s)

Ann C. Chiaramonti Debay, Sten Vollebregt, R. Ishihara, Johan van der Cingel , Kees Beenakker

An Efficient Algorithm for Constraint Handling in Combinatorial Test Generation

March 18, 2013

Author(s)

Raghu N. Kacker

Combinatorial testing has been shown to be a very effective testing strategy. An important problem in combinatorial testing is dealing with constraints, i.e

The Metrology of Counting Protein Particles

March 18, 2013

Author(s)

Dean C. Ripple, Michael J. Carrier, Richard E. Cavicchi, Christopher B. Montgomery, Zhishang Hu

A common degradation pathway for protein-based drugs is the growth of protein aggregates or particles. Counting and characterization of these particles is

The Exothermic Reaction of Fire Suppressants

March 13, 2013

Author(s)

Gregory T. Linteris, Valeri I. Babushok, Fumiaki Takahashi, Viswanath R. Katta, Oliver Meier

Several fire suppressants are under consideration to replace CF3Br for use in suppressing fires in aircraft cargo bays. In Federal Aviation Administration

Hydrated phases and pore solution composition in cement-solidified saltstone waste forms

March 8, 2013

Author(s)

Kenneth A. Snyder, Paul E. Stutzman, Jacob Philip, David W. Esh

The mineral phases and pore solution composition of hydrated cement-solidified saltstone waste forms are quantified using thermogravimetric analysis

Spectral Light source Distribution variations to enhance discrimination of the common bile duct from surroundings in reflectance hyperspectral imaging

March 8, 2013

Author(s)

Maritoni A. Litorja, Mira Fein, Eleanor Wehner, Karel Zuzak, Edward Livingston

The classification of anatomical features using hyperspectral imaging has been a common goal in biomedical hyperspectral imaging. Identification and location of

Adhesion Society Meeting Proceedings

March 3, 2013

Author(s)

Rebecca Ploeger, Aaron Forster, Donald Hunston, Etienne de la Rie, Christopher McGlinchey

Consolidating adhesives have been used throughout the centuries for the conservation of painted cultural objects- such as paintings and polychrome sculpture-

A Hybrid CPU-GPU Approach to Fourier-Based Image Stitching of Optical Microscopy Images

March 3, 2013

Author(s)

Walid Keyrouz, Timothy J. Blattner, Bertrand C. Stivalet, Joe Chalfoun, Mary C. Brady, Shujia Zhou

We present a hybrid CPU-GPU approach for the Fourier-based stitching of optical microscopy images. This system achieves sub-minute stitching rates with large

POROMECHANICS OF THIN WATER PURIFICATION MEMBRANE LAYERS

March 3, 2013

Author(s)

Edwin P. Chan, Christopher M. Stafford, Allison P. Young

In situ monitoring of atmospheric methane using a dense network in the Northeastern U.S.

February 28, 2013

Author(s)

Kuldeep R. Prasad, Elena Novakovskaia, Marc Fischer, Chris Sloop

Methane (CH4) is one of the major greenhouse gases with a CO2relative global warming potential above 20 over a 100-year period (IPCC TAR). Global average

Continuous measurement and large-eddy simulation of greenhouse gas emissions at local spatial scales

February 28, 2013

Author(s)

Kuldeep R. Prasad, Elena Novakovskaia, Adam Nottrott, Ralph Keeling, Chris Sloop

Natural gas a hydrocarbon gas mixture that consists primarily of CH4 is perceived as transition fuel due to its high energy density and lower greenhouse

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