Microelectromechanical systems (MEMS) are integrated devices with critical applications in sensing, timing, signal processing, and biomedical diagnostics, and have become ubiquitous in wireless communications, automobiles, aerospace systems, medical devices, and consumer products. This project advances measurement science for micro- and nanoelectromechanical systems (MEMS/NEMS) with a focus on innovations that will enable future generations of MEMS/NEMS.
MEMS/NEMS are enabling technologies that bring new functionalities with the potential to radically transform markets ranging from consumer products to national defense. The meteoric rise of the smartphone is an excellent example, in which MEMS accelerometers, gyroscopes, microphones, displays, and RF filters and oscillators provide functionality that has made the most sophisticated mobile phone from a decade ago look like a relic. The MEMS industry is expected to continue to grow quickly, particularly due to the establishment of the Internet of Things, which requires ubiquitous sensing, computing, and communications. This project is focused on innovations in measurement science that will enable future generations of MEMS/NEMS. This is achieved by:
Due to the enormous diversity of devices found in this field, the research topics covered by the project are selected to match with growth areas and to be well-positioned within the NIST mission. Our current research is largely in the following areas: