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Yiliang Bao, Feng Zhou, Thomas W. LeBrun, Jason J. Gorman
This paper describes the design, fabrication, and testing of a photonic MEMS accelerometer that uses a hemispherical microcavity to transduce the motion of the
Yiliang Bao, Feng Zhou, Thomas W. LeBrun, Jason J. Gorman
A detailed study of the fabrication of silicon concave micromirrors for hemispherical microcavities is presented that includes fabrication yield, surface
Yiliang Bao, Felipe Guzman, Arvind K. Balijepalli, John R. Lawall, Jacob M. Taylor, Thomas W. LeBrun, Jason J. Gorman
A new design for an optomechanical accelerometer is presented. The design includes a hemispherical optical cavity that can achieve high finesse and a proof mass
Felipe Guzman, Yiliang Bao, Jason J. Gorman, John R. Lawall, Jacob M. Taylor, Thomas W. LeBrun
Current acceleration primary standards reach relative uncertainties of the order of 0.001 and consist of complex test facilities, typically operated at National