The thermal properties of materials and interfaces that govern the performance, reliability, and thermal management in microelectronics packages and wide bandgap power electronics are not fully or easily characterized, especially at device length scales wherein the properties can differ significantly from bulk or literature values. This project will improve thermal property measurements for multilayer semiconductor materials and generate reliable data that feeds into thermal simulations of integrated chips and power electronics. Currently, industry relies on imprecise or assumed input thermal properties for their simulation models. This project will enhance the ability of the semiconductor industry to improve thermal management in chip and microelectronics packaging, leading to fewer thermal failures, increased functionality, and longer operational lifetimes for cell phones, computers, communication chips, and power converter/amplification chips.