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Displaying 1 - 15 of 15

Validation of Single Particle ICP-MS for Routine Measurements of Nanoparticle Size and Number Size Distribution

November 25, 2018
Author(s)
Antonio R. Montoro Bustos, Premsagar P. Kavuri, Antonio M. Possolo, Natalia Farkas, Andras Vladar, Karen E. Murphy, Michael R. Winchester
Single particle inductively coupled plasma-mass spectrometry (spICP-MS) is an emerging technique capable of measuring nanoparticle size and number concentration simultaneously, of metal-containing nanoparticles (NPs) at environmentally relevant levels

Nanoparticle size determination using optical microscopes

October 27, 2014
Author(s)
Ravikiran Attota, Richard J. Kasica, Premsagar P. Kavuri, Hyeong G. Kang, Lei Chen
We present a simple method for size determination of nanoparticles using conventional optical microscopes. The method, called through-focus scanning optical microscopy (TSOM), makes use of the four-dimensional optical information collected at different

Mechanical property changes in porous low-k dielectric thin films during processing

October 15, 2014
Author(s)
Gheorghe Stan, Richard S. Gates, Premsagar P. Kavuri, Jessica Torres, David Michalak, Canay Ege, Jeff Bielefeld, Sean W. King
The design of future generations of Cu-low-k dielectric interconnects with reduced electronic crosstalk often requires engineering materials with an optimal trade off between their dielectric constant and elastic modulus. This is because the benefits

Does Your SEM Really Tell the Truth? How Would You Know? Part 2

May 30, 2014
Author(s)
Michael T. Postek, Andras Vladar, Premsagar P. Kavuri
The scanning electron microscope (SEM)has gone through a tremendous evolution to become indispensable for many and diverse scientific and industrial applications. The improvements have significantly enriched and augmented the overall SEM performance and

Does Your SEM Really Tell the Truth? Part 2

November 1, 2013
Author(s)
Michael T. Postek, Andras Vladar, Premsagar P. Kavuri
The scanning electron microscope (SEM) has gone through a tremendous evolution to become indispensable for many and diverse scientific and industrial applications. The first paper in this series, discussed some of the issues related to signal generation in

Nanoparticle Size and Shape Evaluation Using the TSOM Method

June 1, 2012
Author(s)
Bradley N. Damazo, Ravikiran Attota, Premsagar P. Kavuri, Andras Vladar
A novel through-focus scanning optical microscopy (TSOM) method that yields nanoscale information from optical images obtained at multiple focal planes will be used here for nanoparticle dimensional analysis. The TSOM method can distinguish not only size

Accurate Nanometer-Scale Imaging and Measurements with SEM

August 18, 2011
Author(s)
Bradley N. Damazo, Bin Ming, Premsagar P. Kavuri, Andras Vladar, Michael T. Postek
Scanning electron microscopes (SEMs) are incredibly versatile instruments for millimeter to nanometer scale imaging and measurements of size and shape. New methods to improve repeatability and accuracy have been implemented on the so-called Reference SEMs

AFM characterization of nanopositioner in-plane stiffnesses

August 19, 2010
Author(s)
Seung Ho Yang, Yong Sik Kim, Premsagar P. Kavuri, Jae M. Yoo, Young M. Choi, Nicholas G. Dagalakis
A versatile method for measurement of in-plane stiffness of micro-elements was developed and its usefulness has been demonstrated. The in-plane stiffness of a NIST nanopositioner has been measured directly using a colloidal probe in an AFM without any

Nanoparticle size and shape evaluation using the TSOM optical microscopy method

June 6, 2010
Author(s)
Ravikiran Attota, Richard J. Kasica, Lei Chen, Premsagar P. Kavuri, Richard M. Silver, Andras Vladar
We present a novel optical TSOM (through-focus scanning optical microscopy - pronounced as 'tee-som') method that produces nanoscale dimensional measurement sensitivity using a conventional optical microscope. The TSOM method uses optical information from

Elastic Modulus of Faceted Aluminum Nitride Nanotubes Measured by Contact Resonance Atomic Force Microscopy

December 17, 2008
Author(s)
Gheorghe Stan, C Ciobanu, Timothy Thayer, George Wang, Randall Creighton, Premsagar P. Kavuri, Leonid A. Bendersky, Robert F. Cook
A new methodology for determining the radial elastic modulus of a one-dimensional nanostructure laid on a substrate has been developed. The methodology consists of the combination of contact resonance atomic force microscopy (AFM) with finite element