August 19, 2010
Author(s)
Seung Ho Yang, Yong Sik Kim, Premsagar P. Kavuri, Jae M. Yoo, Young M. Choi, Nicholas G. Dagalakis
A versatile method for measurement of in-plane stiffness of micro-elements was developed and its usefulness has been demonstrated. The in-plane stiffness of a NIST nanopositioner has been measured directly using a colloidal probe in an AFM without any