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AFM characterization of nanopositioner in-plane stiffnesses



Seung Ho Yang, Yong Sik Kim, Premsagar P. Kavuri, Jae M. Yoo, Young M. Choi, Nicholas G. Dagalakis


A versatile method for measurement of in-plane stiffness of micro-elements was developed and its usefulness has been demonstrated. The in-plane stiffness of a NIST nanopositioner has been measured directly using a colloidal probe in an AFM without any fixture. Using this method it was possible to measure the in-plane stiffness at different locations of the same micro-element. The in-plane stiffness ratio of a micro lever system was also measured and a good agreement was found between the calculated and measured values. Further, when the minimum width of flexures is 4 m, the measured in-plane stiffnesses showed a close agreement with the calculated value.
Sensors and Actuators A: Physical


AFM, colloidal probe, in-plane stiffness, MEMS, nanopositioner


, S. , , Y. , Kavuri, P. , Yoo, J. , Choi, Y. and Dagalakis, N. (2010), AFM characterization of nanopositioner in-plane stiffnesses, Sensors and Actuators A: Physical, [online], (Accessed June 20, 2024)


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Created August 19, 2010, Updated February 19, 2017