AFM characterization of nanopositioner in-plane stiffnesses
Seung Ho Yang, Yong Sik Kim, Premsagar P. Kavuri, Jae M. Yoo, Young M. Choi, Nicholas G. Dagalakis
A versatile method for measurement of in-plane stiffness of micro-elements was developed and its usefulness has been demonstrated. The in-plane stiffness of a NIST nanopositioner has been measured directly using a colloidal probe in an AFM without any fixture. Using this method it was possible to measure the in-plane stiffness at different locations of the same micro-element. The in-plane stiffness ratio of a micro lever system was also measured and a good agreement was found between the calculated and measured values. Further, when the minimum width of flexures is 4 m, the measured in-plane stiffnesses showed a close agreement with the calculated value.
, , Y.
, Kavuri, P.
, Yoo, J.
, Choi, Y.
and Dagalakis, N.
AFM characterization of nanopositioner in-plane stiffnesses, Sensors and Actuators A: Physical, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906223
(Accessed December 3, 2023)