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Nanoparticle size and shape evaluation using the TSOM optical microscopy method

Published

Author(s)

Ravikiran Attota, Richard J. Kasica, Lei Chen, Premsagar P. Kavuri, Richard M. Silver, Andras Vladar

Abstract

We present a novel optical TSOM (through-focus scanning optical microscopy - pronounced as 'tee-som') method that produces nanoscale dimensional measurement sensitivity using a conventional optical microscope. The TSOM method uses optical information from multiple focal planes for dimensional analysis. Even though the TSOM method can be used to analyze nanoscale dimensional and defect analysis for a wide variety of target geometries and sizes, we present here an application of the method for size and shape analysis of nanoparticles. We present the analysis based on simulations and also provide experimental data.
Proceedings Title
Nanotech Conference and Expo 2010
Conference Dates
June 21-25, 2010
Conference Location
Anaheim, CA
Conference Title
BioNanotech Conference and Expo 2010

Keywords

TSOM, optical microscope, through-focus, nanoparticles, nanometrology

Citation

Attota, R. , Kasica, R. , Chen, L. , Kavuri, P. , Silver, R. and Vladar, A. (2010), Nanoparticle size and shape evaluation using the TSOM optical microscopy method, Nanotech Conference and Expo 2010, Anaheim, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905490 (Accessed July 16, 2024)

Issues

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Created June 6, 2010, Updated February 19, 2017