Skip to main content
U.S. flag

An official website of the United States government

Dot gov

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Https

Secure .gov websites use HTTPS
A lock ( ) or https:// means you've safely connected to the .gov website. Share sensitive information only on official, secure websites.

Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy

Published

Author(s)

Min-Ho Rim, Emil Agocs, Ronald G. Dixson, Premsagar P. Kavuri, Andras Vladar, Ravikiran Attota
Citation
Journal of Vacuum Science and Technology B

Keywords

Semiconductor fabrication, contamination, detection, defects, TSOM
Created August 27, 2020, Updated September 1, 2020