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Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy



Min-Ho Rim, Emil Agocs, Ronald G. Dixson, Premsagar P. Kavuri, Andras Vladar, Ravikiran Attota
Journal of Vacuum Science and Technology B


Semiconductor fabrication, contamination, detection, defects, TSOM
Created August 27, 2020, Updated September 1, 2020