Rim, M.
, Agocs, E.
, Dixson, R.
, Kavuri, P.
, Vladar, A.
and Attota, R.
(2020),
Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy, Journal of Vacuum Science and Technology B, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=928754
(Accessed December 12, 2024)
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Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy
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Author(s)
Min-Ho Rim, , , , ,
Citation
Journal of Vacuum Science and Technology B
Pub Type
Journals
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Keywords
Semiconductor fabrication, contamination, detection, defects, TSOM
Citation
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If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created August 27, 2020, Updated October 12, 2021