@article{811296,
  author = {Min-Ho Rim and Emil Agocs and Ronald Dixson and Premsagar Kavuri and Andras Vladar and Ravikiran Attota},
  title = {Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy},
  year = {2020},
  month = {2020-08-28 00:08:00},
  publisher = {Journal of Vacuum Science and Technology B},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=928754},
  language = {en},
}