TY  - JOUR
AU  - Min-Ho Rim
AU  - Emil Agocs
AU  - Ronald Dixson
AU  - Premsagar Kavuri
AU  - Andras Vladar
AU  - Ravikiran Attota
C2  - Journal of Vacuum Science and Technology B
DA  - 2020-08-28 00:08:00
LA  - en
PB  - Journal of Vacuum Science and Technology B
PY  - 2020
TI  - Detecting nanoscale contamination in semiconductor fabrication using through-focus scanning optical microscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=928754
ER  -