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Search Publications by: Michael J. Fasolka (Fed)

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Displaying 51 - 67 of 67

Characterizing Surface Roughness of Thin Films by Polarized Light Scattering

November 1, 2003
Author(s)
Thomas A. Germer, Michael J. Fasolka
The polarization of light scattered by the surface of a material contains information that can be used to identify the sources of that scatter. In this paper, first order vector perturbation theory for light scattering from interfacial roughness of a

Fourier Analysis Near-Field Polarimetry for Measurement of Local Optical Properties of Thin Films

July 1, 2003
Author(s)
Lori S. Goldner, Michael J. Fasolka, S Nougier, H P. Nguyen, Garnett W. Bryant, Jeeseong Hwang, K D. Weston, Kathryn L. Beers, A Urbas, Edwin L. Thomas
We present measurements of the local dichroism and birefringence of thin film specimens us ing techniques that combine near-field scanning optical microscopy (NSOM) and a novel polarization modulation (PM) polarimetry utilizing Fourier analysis of the

Chemically Amplified Resist Fundamentals Studies by Combinatorial approaches

March 1, 2003
Author(s)
M Wang, Vivek Prabhu, Eric K. Lin, Michael J. Fasolka, Alamgir Karim
Sub-100 nm lithography requires more understanding of photoresist material properties and processing conditions to achieve necessary critical dimension control of patterned structures. As resist thickness and feature linewidth decrease, fundamental

Near-Field Polarimetric Characterization of Semi-Crystalline Polymer Systems

March 1, 2003
Author(s)
S N. Goldie, Michael J. Fasolka, Lori S. Goldner, Jeeseong C. Hwang, Kathryn Beers
We have studied crystallization in thin films of isotactic polystyrene (iPS) to better understand the morphology and formation of these structures through the use of polarization modulation near-field scanning optical microscopy (PM-NSOM). Polymer

Nanoscale Chemical Imaging of Polymeric Materials With Atomic Force Microscopy

February 26, 2003
Author(s)
Xiaohong Gu, Tinh Nguyen, Michael J. Fasolka, D Julthongpiput, Lei Chen, Mark R. VanLandingham, Y C. Jean, Jonathan W. Martin
Nanoscale spatial chemical information is essential to developing a molecular-level understanding of a variety of phenomena occurring at surfaces and interfaces, including adhesion, friction, and surface reactivity. Therefore, the ability to probe and

Near-Field Optical Imaging of Microphase Separated and Semi-Crystalline Polymer Systems

January 1, 2002
Author(s)
Michael J. Fasolka, Lori S. Goldner, A Urbas, Jeeseong C. Hwang, Kathryn Beers, P DeRege, Evan L. Thomas
Polymer self-assembly presents an attractive means of creating the micro- and nano-patterned spatial arrays required for many opto-electronic and coatings technologies. Two of these ordering processes are microphase separation (MS), exhibited by block

Block Copolymer Thin Films: Physics and Applications

February 15, 2001
Author(s)
Michael J. Fasolka, A M. Mayes
A two-part review of research concerning block copolymer thin films is presented. The first section summarizes experimental and theoretical studies of the fundamental physics of these systems, concentrating upon the forces that govern film morphology. The

Newton's Rings in Near-Field Optics

January 1, 2001
Author(s)
Lori S. Goldner, Jeeseong Hwang, Garnett W. Bryant, Michael J. Fasolka, P Absil, J V. Hryniewicz, F G. Johnson, H Shen, P T. Ho
We show how Newton's rings manifest themselves in near-field scanning optical microscopy and discuss how this effect can be used with topographic imaging to measure correlated roughness of thin films. In conventional optics, transmission through a thin