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Search Publications by: Ulf Griesmann (Fed)

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Displaying 76 - 100 of 123

Manufacture and Metrology of 300 mm Silicon Wafers with Ultra-Low Thickness Variations

January 2, 2007
Author(s)
Ulf Griesmann, Quandou (. Wang, Marc Tricard, Paul Dumas, Christopher Hill
With the evolution of exposure tools for optical lithography towards larger numerical apertures, the semiconductor industry expects continued demand for improved wafer flatness at the exposure site. The Allowable site flatness for 300 mm wafers is expected

Three-Flat Test Solutions based on Simple Mirror Symmetry

August 1, 2006
Author(s)
Ulf Griesmann
Three-flat tests are the archetypes of measurement procedures used in interferometric surface and wavefront metrology to separate errors in the interferometer reference wavefront from errors due to the tests part surface, so-called absolute tests. A new

Form-Profiling of Optics Using the Geometry Measuring Machine and NIST M-48 CMM

January 1, 2006
Author(s)
Nadia Machkour-Deshayes, John R. Stoup, John Lu, Johannes A. Soons, Ulf Griesmann, Robert S. Polvani
We are developing an instrument, the Geometry Measuring Machine (GEMM), to measure the profile errors of aspheric and free form optical surfaces, which require measurement uncertainties near 1nm. Using GEMM, an optical profile is reconstructed from a set

Uncertainties in Aspheric Profile Measurements with the Geometry Measuring Machine at NIST

July 31, 2005
Author(s)
Ulf Griesmann, Nadia Machkour-Deshayes, Byoung C. Kim, Quandou (. Wang, Lahsen Assoufid
The Geometry Measuring Machine (GEMM) of the National Institute of Standards and Technology (NIST) is a profilometer for free-form surfaces. A profile is reconstructed from local curvature of a test part surface, measured at several locations along a line

Interferometric Thickness Calibration of 300mm Silicon Wafers

July 20, 2005
Author(s)
Quandou (. Wang, Ulf Griesmann, Robert S. Polvani
The Improved Infrared Interferometer (IR3) at the National Institute of Standards and Technology (NIST) is a phase-measuring interferometer, operating at a wavelength of 1550 nm, which is being developed for measuring the thickness and thickness variation

Optical Flatness Metrology for 300 mm Silicon Wafers

April 1, 2005
Author(s)
Ulf Griesmann, Quandou (. Wang, T D. Raymond
At the National Institute of Standards and Technology (NIST), we are developing two interferometric methods for measuring the thickness variation and flatness of free-standing and chucked silicon wafers with diameters up to 300mm. The eXtremely accurate

A Simple Ball Averager for Reference Sphere Calibrations

January 1, 2005
Author(s)
Ulf Griesmann, Quandou (. Wang, Johannes A. Soons, Remi Carakos
When measuring the form errors of precision optics with an interferometer, the calibration of the reference wavefront is of central importance. Ball averaging, or random ball testing, has in recent years emerged as a robust method for calibrating spherical

Modal Reconstruction of Aspheric Surfaces from Experimental Second Derivatives

January 1, 2005
Author(s)
Nadia Machkour-Deshayes, Ulf Griesmann, Byoung C. Kim
A method for the measurement of precise aspheric optical surfaces based on measurements of the second derivatives of the surface is evaluated. A compact phase-measuring interferometer is used to determine the second derivatives of a surface on a survey

Characterization of Precision Spheres With XCALIBIR

January 1, 2004
Author(s)
Ulf Griesmann, Johannes A. Soons, Quandou (. Wang
The geometry of a nearly spherical surface, for example that of a precision optic, is completely determined by the radius-of-curvature at one point and the deviation from the perfect spherical form at all other points of the sphere. Measurements of radius

Measuring Form and Radius of Spheres With Interferometry

January 1, 2004
Author(s)
Quandou (. Wang, Johannes A. Soons, Ulf Griesmann
The geometry of a nearly spherical surface, for example that of a precision optic, is completely determined by the radius of curvature at one point and deviation from the perfect spherical form at all other points of the sphere. Measurements of radius and