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Displaying 2376 - 2400 of 2724

NIST Calibration Service for Capacitance Standards at Low Frequencies

April 1, 1998
Author(s)
Yui-May Chang, Summerfield B. Tillett
This document describes the capacitance calibration service provided by NIST, including measurement procedures and systems used to calibrate capacitance standards of nominal values in the range of 0.001 pF to 1 F, at frequencies up to 10 kHz. Discussed are

Summary Report of NIST/MSC Workshop on Traceability in Length

April 1, 1998
Author(s)
Dennis A. Swyt
The National Institute of Standards and Technology, in conjunction with the Measurement Science Conference, conducted an industry-needs workshop on February 4, 1998, on issues with U.S. manufacturing companies, particularly smaller ones, may have in

Analytical/Experimental Study of Vibration of a Room-Sized Airspring-Supported Slab

March 1, 1998
Author(s)
H Amick, B Sennewald, E C. Teague, Brian R. Scace
This paper reports the results of the finite element analysis and in-situ testing of a large-scale (4 m x 10 m) pneumatically isolated concrete slab are reported. The slab was constructed as a design prototype for next generation metrology laboratories at

Round Robin Determination of Power Spectral Densities of Different Si Wafer Surfaces

March 1, 1998
Author(s)
Egon Marx, I J. Malik, Y Strausser, T Bristow, N Poduje, J C. Stover
Power spectral densities (PSDs) were used to characterize a set of surfaces over a wide range of lateral as well as perpendicular dimensions. Twelve 200-mm-diameter Si wafers were prepared and the surface finishes ranged from as-ground wafers to epitaxial

Tip Characterization for Scanned Probe Microscope Width Metrology

March 1, 1998
Author(s)
Samuel Dongmo, John S. Villarrubia, Samuel N. Jones, Thomas B. Renegar, Michael T. Postek, Jun-Feng Song
Determination of the tip shape is an important prerequisite for converting the various scanning probe microscopies form imaging tools into dimensional metrology tools with sufficient accuracy to meet the critical dimension measurement requirements of the

Uncertainty Analysis for Angle Calibrations Using Circle Closure

March 1, 1998
Author(s)
William T. Estler
We analyze two types of full-circle angle calibrations: a simple closure in which a single set of unknown angular segments is sequentially compared with an unknown reference angle, and a dual closure in which two divided circles are simultaneously

NIST Measurement Services: NIST Multifunction Calibration System

February 1, 1998
Author(s)
Nile M. Oldham, Mark E. Parker
The NIST automated Multifunction Calibration System (MCS) for voltage, current, and resistance is described. Developed primarily to calibrate digital multimeters and calibrators, the system can also be used to test thermal converters, and

Advances in NIST Standard Rockwell Diamond Indenters

January 1, 1998
Author(s)
Jun-Feng Song, Samuel R. Low III, David J. Pitchure, Theodore V. Vorburger
Recent developments in standard hardness machines and microform calibration techniques have made it possible to establish a worldwide unified Rockwell hardness scale with metrological traceability. This includes the establishments of the reference

Extinction Coefficients for Dielectric and Conducting Doublets of Spheres

January 1, 1998
Author(s)
Egon Marx
The extinction cross-sections of doublets of polystyrene and carbon spheres are determined using the optical theorem. The forward scattering amplitude is computed using the single integral equation method. The extinction cross-sections of the doublets are

Image Sharpness Measurement in Scanning Electron Microscopy - Part I

January 1, 1998
Author(s)
Michael T. Postek, Andras Vladar
This study introduces the idea of the sharpness concept in relationship to the determination of scanning electron microscope (SEM) perfomance. Scanning electron microscopes are routinely used in many manufacturing environments. Fully automated or

Improving Step Height and Pitch Measurements Using the Calibrated Atomic Force Microscope

January 1, 1998
Author(s)
R Koning, Ronald G. Dixson, Joseph Fu, V W. Tsai, Theodore V. Vorburger
The most important industrial application of Atomic Force Microscopy (AFM) is probably the accurate measurement of geometrical dimensions of small surface structures. In order to maintain the instrument''s performance and to achieve the high accuracy often

Measurement Traceability of NIST Standard Rockwell Diamond Indenters

January 1, 1998
Author(s)
Jun-Feng Song, Samuel R. Low III, Walter S. Liggett Jr, David J. Pitchure, Theodore V. Vorburger
A metrology-based Rockwell hardness scale is established by a standard machine and a standard diamond indenter. Both must be established through force and dimensional metrology with acceptably small measurement uncertainties. In 1994, NIST developed a
Displaying 2376 - 2400 of 2724
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