NIST Virtual/Physical Random Profile Roughness Calibration Standards

Published

October 1, 1998

Author(s)

Jun-Feng Song, Christopher J. Evans, Michael L. McGlauflin, Eric P. Whitenton, Theodore V. Vorburger, Y B. Yuan

Abstract

The NIST (National Institute of Standards and Technology) virtual/physical surface roughness calibration standard consists of physical specimens whose surfaces are manufactured by a numerically controlled diamond-turning process using digitized profiles. These standards are designed for checking the characteristics and algorithms of surface measuring systems, and for sensing the amount of distortion of the surface information flow through different measuring systems. The digitized profiles can also be used for remote instrument calibration and surface measurement unification. The design, manufacture, test results, and potential uses of the NIST prototype specimens are discussed.

Proceedings Title

SPIE Electronic Imaging Conference, Scattering and Surface Roughness II, Zu-Han Gu, Alexei A. Maradudin, Editors

Volume

3426

Conference Dates

July 21, 1998

Conference Location

San Diego, CA, USA

Conference Title

Surface Roughness Calibration, Instrumentation, And Application

Pub Type

Conferences

Keywords

calibration, diamond turning, information technology, random profile, specimen, surface roughness

Citation

Song, J. , Evans, C. , McGlauflin, M. , Whitenton, E. , Vorburger, T. and Yuan, Y. (1998), NIST Virtual/Physical Random Profile Roughness Calibration Standards, SPIE Electronic Imaging Conference, Scattering and Surface Roughness II, Zu-Han Gu, Alexei A. Maradudin, Editors, San Diego, CA, USA (Accessed December 4, 2024)