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NIST Virtual/Physical Random Profile Roughness Calibration Standards

Published

Author(s)

Jun-Feng Song, Christopher J. Evans, Michael L. McGlauflin, Eric P. Whitenton, Theodore V. Vorburger, Y B. Yuan

Abstract

The NIST (National Institute of Standards and Technology) virtual/physical surface roughness calibration standard consists of physical specimens whose surfaces are manufactured by a numerically controlled diamond-turning process using digitized profiles. These standards are designed for checking the characteristics and algorithms of surface measuring systems, and for sensing the amount of distortion of the surface information flow through different measuring systems. The digitized profiles can also be used for remote instrument calibration and surface measurement unification. The design, manufacture, test results, and potential uses of the NIST prototype specimens are discussed.
Proceedings Title
SPIE Electronic Imaging Conference, Scattering and Surface Roughness II, Zu-Han Gu, Alexei A. Maradudin, Editors
Volume
3426
Conference Dates
July 21, 1998
Conference Location
San Diego, CA, USA
Conference Title
Surface Roughness Calibration, Instrumentation, And Application

Keywords

calibration, diamond turning, information technology, random profile, specimen, surface roughness

Citation

Song, J. , Evans, C. , McGlauflin, M. , Whitenton, E. , Vorburger, T. and Yuan, Y. (1998), NIST Virtual/Physical Random Profile Roughness Calibration Standards, SPIE Electronic Imaging Conference, Scattering and Surface Roughness II, Zu-Han Gu, Alexei A. Maradudin, Editors, San Diego, CA, USA (Accessed April 14, 2024)
Created September 30, 1998, Updated October 12, 2021