@conference{840966, author = {Jun-Feng Song and Christopher Evans and Michael McGlauflin and Eric Whitenton and Theodore Vorburger and Y Yuan}, title = {NIST Virtual/Physical Random Profile Roughness Calibration Standards}, year = {1998}, number = {3426}, month = {1998-10-01 00:10:00}, publisher = {SPIE Electronic Imaging Conference, Scattering and Surface Roughness II, Zu-Han Gu, Alexei A. Maradudin, Editors, San Diego, CA, USA}, language = {en}, }