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Simulation and Measurement of Subsurface Features in Scanning Electron Microscopy Metrology

Published

Author(s)

J R. Lowney, Michael T. Postek, Samuel N. Jones, S Mayo, Michael W. Cresswell
Citation
Scanning
Volume
20(3)

Citation

Lowney, J. , Postek, M. , Jones, S. , Mayo, S. and Cresswell, M. (1998), Simulation and Measurement of Subsurface Features in Scanning Electron Microscopy Metrology, Scanning (Accessed June 15, 2024)

Issues

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Created March 31, 1998, Updated October 12, 2021