@article{755986,
  author = {J Lowney and Michael Postek and Samuel Jones and S Mayo and Michael Cresswell},
  title = {Simulation and Measurement of Subsurface Features in Scanning Electron Microscopy Metrology},
  year = {1998},
  number = {20(3)},
  month = {1998-04-01 00:04:00},
  publisher = {Scanning},
  language = {en},
}