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Displaying 57801 - 57825 of 74189

Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards

May 1, 1994
Author(s)
Michael W. Cresswell, William B. Penzes, Robert Allen, L Linholm, C Ellenwood, E C. Teague
This test structure is based on the voltage-dividing potentiometer principle and was originally replicated in a single lithography cycle to evaluate feature placement by a primary pattern generator. A new test structure has now been developed from the

Fire Conditions for Smoke Toxicity Measurement

May 1, 1994
Author(s)
Richard G. Gann, V Babrauskas, Richard D. Peacock, J R. Hall
This paper identifies those fire conditions most often present when smoke toxicity is the cause of death. It begins with a review of the evidence that smoke-inhalation deaths are in the majority in fire fatalities in the United States. Next, there is an

Nanostructure Fabrication via Direct Writing with Atoms Focused in Laser Fields

May 1, 1994
Author(s)
R E. Scholten, Jabez J. McClelland, E C. Palm, A Gavrin, Robert Celotta
The techniques of atom optics can be applied during the deposition of atoms onto a surface to produce nanostructures. A laser is used to form a standing wave intensity pattern in front of the substrate. An atom beam, which has been collimated by optical

Photoreflectance Study of the Chemically Modified (100) GaAs Surface

May 1, 1994
Author(s)
John A. Dagata, O Glembocki, J Tuchman, K Ko, S Pang
Photoreflectance (PR) spectroscopy has been used to study the Fermi-level pinning position of chemically modified (100) GaAs surfaces. It is shown that there are two pinning positions for the unmodified (100) GaAs surface. For n-GaAs, the Fermi level pins
Displaying 57801 - 57825 of 74189
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