Zincke, C.
, Gaitan, M.
, Zaghloul, M.
and Linholm, L.
(1994),
Test Structures for Determining Design Rules for Microelectromechanical-Based Sensors and Actuators, Proc., IEEE 1994 Conference on Microelectronic Test Structures, San Diego, CA, USA
(Accessed April 25, 2024)
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Test Structures for Determining Design Rules for Microelectromechanical-Based Sensors and Actuators
Published
Author(s)
C. A. Zincke, , ,
Proceedings Title
Proc., IEEE 1994 Conference on Microelectronic Test Structures
Conference Dates
March 22-24, 1994
Conference Location
San Diego, CA, USA
Pub Type
Conferences
Citation
Created December 30, 1994, Updated October 12, 2021