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Test Structures for Determining Design Rules for Microelectromechanical-Based Sensors and Actuators

Published

Author(s)

C. A. Zincke, Michael Gaitan, Mona E. Zaghloul, Loren W. Linholm
Proceedings Title
Proc., IEEE 1994 Conference on Microelectronic Test Structures
Conference Dates
March 22-24, 1994
Conference Location
San Diego, CA, USA

Citation

Zincke, C. , Gaitan, M. , Zaghloul, M. and Linholm, L. (1994), Test Structures for Determining Design Rules for Microelectromechanical-Based Sensors and Actuators, Proc., IEEE 1994 Conference on Microelectronic Test Structures, San Diego, CA, USA (Accessed April 19, 2024)
Created December 30, 1994, Updated October 12, 2021