TY  - CONF
AU  - C. Zincke
AU  - Michael Gaitan
AU  - Mona Zaghloul
AU  - Loren Linholm
C2  - Proc., IEEE 1994 Conference on Microelectronic Test Structures, San Diego, CA, USA
DA  - 1994-12-31 00:12:00
LA  - en
PB  - Proc., IEEE 1994 Conference on Microelectronic Test Structures, San Diego, CA, USA
PY  - 1994
TI  - Test Structures for Determining Design Rules for Microelectromechanical-Based Sensors and Actuators
ER  -