@conference{794521,
  author = {C. Zincke and Michael Gaitan and Mona Zaghloul and Loren Linholm},
  title = {Test Structures for Determining Design Rules for Microelectromechanical-Based Sensors and Actuators},
  year = {1994},
  month = {1994-12-31 00:12:00},
  publisher = {Proc., IEEE 1994 Conference on Microelectronic Test Structures, San Diego, CA, USA},
  language = {en},
}