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Displaying 57126 - 57150 of 74219

Measurement of Patterned Film Linewidth for Interconnect Characterization

January 1, 1995
Author(s)
L Linholm, Robert Allen, Michael W. Cresswell, Rathindra Ghoshtagore, S Mayo, H Schafft, John A. Kramar
The results from high-quality electrical and physical measurements on the same cross-bridge resistor test structure with approximately vertical sidewalls have shown differences in linewidth as great as 90 nm for selected conductive films. These differences

Measuring Long Gage Blocks with the NIST Line Scale Interferometer

January 1, 1995
Author(s)
John S. Beers
An improved method for temporarily converting long gage blocks into line scales is described. The new process employs fused silica rather than previously used steel conversion gage blocks. Conversion blocks are pairs of small (13 mm) gage blocks with

MODELING OF HYDROGEN FLUORIDE FORMATION FROM FLAME SUPPRESSANTS DURING COMBUSTION

January 1, 1995
Author(s)
Valeri I. Babushok, Donald R. Burgess Jr., Gregory T. Linteris, Wing Tsang, A W. Miziolek
We have completed an initial computational study related to acid gas formation for two of the leading near-term Halon substitutes, FE-13 (CF,H) and HFC-125 (C,F,H), and compared these results with Halon 1301 (CF,Br). Our goal is to determine whether we can

Motion-Model-Based Boundary Extraction

January 1, 1995
Author(s)
H Liu, Tsai H. Hong, Martin Herman, Rama Chellappa
Motion boundary extraction and optical flow computation are two subproblems of the motion recovery problem that cannot be solved independently of each other. They represent the most common dilemma in motion research. A popular approach uses an iterative
Displaying 57126 - 57150 of 74219
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