Linholm, L.
, Allen, R.
, Cresswell, M.
, Ghoshtagore, R.
, Mayo, S.
, Schafft, H.
and Kramar, J.
(1995),
Measurement of Patterned Film Linewidth for Interconnect Characterization, Proceedings of IEEE International Conference on Microelectronic Test Structures, Nara, 1, JA
(Accessed October 15, 2024)