Berggren, K.
, Bard, A.
, Wilbur, J.
, Gillaspy, J.
, Helg, A.
, McClelland, J.
, Rolston, S.
, Phillips, W.
, Prentiss, M.
and Whitesides, G.
(1995),
Microlithography By Using Neutral Metastable Atoms and Self-Assembled Monolayers, Science
(Accessed April 25, 2024)
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Microlithography By Using Neutral Metastable Atoms and Self-Assembled Monolayers
Published
Author(s)
K K. Berggren, , J L. Wilbur, , A G. Helg, , , , M Prentiss, G M. Whitesides
Citation
Science
Volume
269
Pub Type
Journals
Citation
Created December 31, 1994, Updated October 12, 2021