November 12, 1998
Author(s)
V. Milanovic, E. D. Bowen, N. H. Tea, Michael Gaitan, Mona E. Zaghloul
This paper describes a CMOS implementation of novel ID and 2D accelerometers that operate based on heat convection, requiring no solid proof mass. The devices consist of micromachined microheaters and thermocouple sensors separated by a gap and placed in