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Displaying 46451 - 46475 of 73697

NIST/SEMATECH Collaboration: Application of Nano-Tips to Production CD-SEMs

January 1, 2001
Author(s)
Andras Vladar, Michael T. Postek
This is the final report of a two-part study about the application of nano-tips to critical dimension (CD) scanning electron microscope (SEMs) used in integrated circuit production. Nano-tips are essentially very sharp electron emitter tips that offer an

Odyssey Text Independent Evaluation Data

January 1, 2001
Author(s)
Mark A. Przybocki, Alvin F. Martin
We discuss the text-independent data supplied for the 2001: A Speaker Odyssey evaluation track. We cover the data creation and selection process, and we present results restricted to the Odyssey test set for participating systems in the 2000 NIST Speaker
Displaying 46451 - 46475 of 73697
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