Four-Port Microwave Measurement System Speeds On-Wafer Calibration and Test
Dave K. Walker, Dylan F. Williams, Allen Padilla, Uwe Arz, Hartmut Grabinski
A multiport measurement system comprising a coaxial switch network and comprehensive freeware package extends the capabilities of a user's two-port automatic network analyzer and probe station to three-and four-port measurements. The coaxial switch matrix is easily constructed using inexpensive off-the-shelf components. The software includes routines for calibration, measurement, and correction, and generates normal and differential scattering and impedance parameters in a variety of standard data formats. Any in-line two-port calibration, including the multiline Thru-Reflect-Line method, may be used to correct the measurement data.
, Williams, D.
, Padilla, A.
, Arz, U.
and Grabinski, H.
Four-Port Microwave Measurement System Speeds On-Wafer Calibration and Test, Microwave Journal, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=28489
(Accessed December 5, 2023)