May 1, 2002
      
                  
        
  Author(s)
  Holger  Laabs,   Richard D. Jones,   Marla L. Dowell
 
       
            
    
    
        We have established a measurement system for the direct calibration of energy density (dose) meters. It consists of beam-shaping objects, a beamsplitter, calibrated apertures, a beam profile monitor, an energy monitor, and a transfer standard. The 193 nm