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Displaying 38426 - 38450 of 74214

Traceable Pico-Meter Level Step Height Metrology

December 1, 2004
Author(s)
Ndubuisi G. Orji, Ronald G. Dixson, Joseph Fu, Theodore V. Vorburger
The atomic force microscope (AFM) increasingly being used as a metrology tool in the semiconductor industry where the features measured are at the nanometer level and continue to decrease. Usually the height sensors of the AFM are calibrated using step

Troubleshooting Key Comparisons

December 1, 2004
Author(s)
Adriana Hornikova, William F. Guthrie
Key Comparisons are international inter-laboratory studies used to establish the degree of equivalence between national measurement standards. These studies, carried out by National Measurement Institutes, are time-consuming, but necessary to facilitate

Uncertainty of the NIST Electrooptic Sampling System

December 1, 2004
Author(s)
Dylan F. Williams, Paul D. Hale, Tracy S. Clement
We present an uncertainty analysis of measurements performed with NIST's electrooptic sampling system. The system measures the voltage waveform injected by a photodetector on a coplanar waveguide fabricated on an electrooptic LiTaO3 wafer. The frequency

Variability in Specifications

December 1, 2004
Author(s)
Lynne S. Rosenthal
The goal of this document is to help W3C editors write better specifications, by making a specification easier to interpret without ambiguity and clearer as to what is required in order to conform. It focuses on how to define and specify conformance. It

Vibration Signatures for Three Positive Displacement Compressors

December 1, 2004
Author(s)
David A. Yashar, William V. Payne
This report presents vibration data for three positive displacement compressors which will be used to evaluate Microelectromechanical Systems (MEMS) vibration sensors at a later time. The axial, radial and tangential vibration signatures of three

XML Conformance Test Process Document

December 1, 2004
Author(s)
Sandra Martinez
The goal of this document is to help W3C editors write better specifications, by making a specification easier to interpret without ambiguity and clearer as to what is required in order to conform. It focuses on how to define and specify conformance. It

XML Schema Validation Process for CORE.GOV

December 1, 2004
Author(s)
KC Morris, Boonserm Kulvatunyou, Simon P. Frechette, Joshua Lubell, Puja Goyal
Many integration projects today rely on shared semantic models based on standards represented using Extensible Mark up Language (XML) technologies. Shared semantic models typically evolve and require maintenance. In addition, to promote interoperability

High Inversion Current in Silicon Nanowire Field Effect Transistors

November 30, 2004
Author(s)
Sang-Mo Koo, Jin-Ping Han, Eric M. Vogel, Curt A. Richter, J. Vahakangas, Akira Fujiwara
Silicon nanowire (SiNW) field effect transistors (FETs) with channel widths down to 20 nm have been fabricated by a conventional 'top-down?approach using electron-beam lithography. The SiNW device shows higher inversion channel current density than the
Displaying 38426 - 38450 of 74214
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