January 1, 2006
Author(s)
Jun-Feng Song, Lijun Ma, Theodore V. Vorburger
Five parameters are used for 2D and 3D topography comparisons and measurements, those include two correlation parameters Ds and CCFmax , and three surface parameters: the r-m-s roughness Rq (or Sq for 3D), r-m-s waviness Wq and Gaussian filter long