MEMS Length and Strain Round Robin Results with Uncertainty Analysis

Published

February 1, 2006

Author(s)

Janet M. Cassard, Robert I. Scace, Winthrop A. Baylies

Abstract

A microelectromechanical systems (MEMS) Length and Strain Round Robin Experiment was completed in January 2005 to compare results of in-plane length measurements, residual strain measurements, and strain gradient measurements at a number of laboratories. This paper presents the results from this MEMS Length and Strain Round Robin Experiment and the uncertainties associated with the measurements. The final results satisfy the requirements for the formulation of precision and bias statements in three related American Society for Testing and Materials (ASTM) standard test methods for MEMS. The goal of the round robin was to assess the reproducibility of measurements performed using the same test method at independent laboratories as well as the repeatability of measurements performed using the same test method, in the same laboratory, by the same operator, with the same equipment, in the shortest practicable period of time. Both the reproducibility and repeatability measurements were done on essentially random test units made of the same homogeneous material. The outcome of this round robin is a step towards assuring high quality data, which will help reduce the laboratory-to-laboratory differences in the parametric measurements.

Citation

NIST Interagency/Internal Report (NISTIR) - 7291

Report Number

7291

NIST Pub Series

NIST Interagency/Internal Report (NISTIR)

Pub Type

NIST Pubs

Download Paper

https://doi.org/10.6028/NIST.IR.7291

Local Download

Keywords

cantilevers, combined standard uncertainty, fixed-fixed beams, interferometry, length measurements, MEMS, microelectromechanical systems, polysilicon, residual strain, round robin, strain gradient, test structure

Citation

Cassard, J. , Scace, R. and Baylies, W. (2006), MEMS Length and Strain Round Robin Results with Uncertainty Analysis, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.7291, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32142 (Accessed October 13, 2025)