@misc{770136,
  author = {Janet Cassard and Robert Scace and Winthrop Baylies},
  title = {MEMS Length and Strain Round Robin Results with Uncertainty Analysis},
  year = {2006},
  month = {2006-02-01 00:02:00},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32142},
  doi = {https://doi.org/10.6028/NIST.IR.7291},
  language = {en},
}