TY  - GEN
AU  - Janet Cassard
AU  - Robert Scace
AU  - Winthrop Baylies
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2006-02-01 00:02:00
DO  - https://doi.org/10.6028/NIST.IR.7291
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2006
TI  - MEMS Length and Strain Round Robin Results with Uncertainty Analysis
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32142
ER  -