March 13, 2009
      
                  
        
  Author(s)
  Charles S. Tarrio,   Steven E. Grantham,   Marc J. Cangemi,   Robert E. Vest,   Thomas B. Lucatorto,   Noreen  Harned
 
       
            
    
    
        As part of its role in providing radiometric standards in support of industry, NIST has been active in advancing extreme ultraviolet dosimetry on various fronts. Recently, we undertook a major effort in accurately measuring the sensitivity of three extreme