July 9, 2005
Author(s)
Dale E. Newbury, Kent D. Irwin, Gene C. Hilton, David A. Wollman, John A. Small, John M. Martinis
… high current density electron beam, 5 keV to 30 keV in energy, to excite characteristic x-rays from a picogram … complementary. Nevertheless, existing EPMA/WDS/EDS technology has limitations which become extreme when applied … EDS achieves impressive performance for EPMA in terms of resolving key elemental interferences, detecting …