Performance Evaluation of a Prototype Machine Tool for Machining Meso-scaled Parts

Published

January 1, 2003

Author(s)

Bradley N. Damazo, M A. Donmez, Michael L. McGlauflin, J B. Werkmeister, Johannes A. Soons, S C. Bryant, Alex Slocum

Abstract

With the increased prevalence of meso-scaled products and feature sizes, new tools are needed to bridge the gap between fabrication processes tailored for micrometer and millimeter sized features [1-4]. Compared to its traditional counterpart, a small machine tool designed for meso-scale parts has the advantages of:ease of use, smaller footprint, smaller structural loop, shorter distances between the workpiece and the machine''s metrology devices, opportunities for improved machine metrology, and easier environmental control. At the same time, the small work volume presents a challenge when measuring the machine''s geometric errors, as traditional machine tool metrology instruments (i.e. lasers, ballbars, levels, etc.) are difficult if not impossible to use in very small work volumes. This paper describes a prototype three-axis meso-scale machine tool configured for rotary milling applications and will present performance evaluation results for this machine. This machine is one of three meso-scale machine tools under development within the Machine Tool Metrology Group at the National Institute of Standards and Technology (NIST). This project is focused on developing new metrology tools and methods for small work volume meso-scaled machine tools.

Conference Dates

October 26-31, 2003

Conference Location

Portland, OR

Conference Title

18th International Ship Control Systems Symposium

Pub Type

Conferences

Keywords

machine tool, meso-scale

Citation

Damazo, B. , Donmez, M. , McGlauflin, M. , Werkmeister, J. , Soons, J. , Bryant, S. and Slocum, A. (2003), Performance Evaluation of a Prototype Machine Tool for Machining Meso-scaled Parts, 18th International Ship Control Systems Symposium, Portland, OR (Accessed October 11, 2025)