June 1, 1999
Author(s)
John S. Villarrubia, Ronald G. Dixson, Samuel N. Jones, J R. Lowney, Michael T. Postek, Richard A. Allen, Michael W. Cresswell
… Uncertainty in the locations of line edges dominates the uncertainty … are mirror images of one another, so any modeling error in the position assignment will have opposite signs for the … for SEM, AFM, and ECD measurements of sub-micrometer lines in single crystal Si. Edge positions are determined from SEM …