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PUBLICATIONS

Comparative Study of Porous SOG Films with Different Non-Destructive Instrumentation

Published

Author(s)

M R. Baklanov, E Kondoh, Eric K. Lin, D W. Gidley, V. J. Lee, K P. Mogilnikov, J N. Sun
Conference Location
Undefined
Conference Title
Proc. of the Intl. Interconnect Technology Conf
Pub Type
Conferences

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Keywords

Electronic Materials, Nanostructured Materials, Reflectivity, Scattering, Thin Films, ellipsometric porosimetry, pore size, poresize distribution, porosity, porous low-k dielectric, positron annihilation lifetime spectrosc, small angle neutron scattering, x-ray reflectivity

Citation

Baklanov, M. , Kondoh, E. , Lin, E. , Gidley, D. , Lee, V. , Mogilnikov, K. and Sun, J. (2001), Comparative Study of Porous SOG Films with Different Non-Destructive Instrumentation, Proc. of the Intl. Interconnect Technology Conf, Undefined, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853742 (Accessed October 6, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 31, 2000, Updated October 12, 2021