NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Comparative Study of Porous SOG Films with Different Non-Destructive Instrumentation

Published

Author(s)

M R. Baklanov, E Kondoh, Eric K. Lin, D W. Gidley, V. J. Lee, K P. Mogilnikov, J N. Sun
Conference Location
Undefined
Conference Title
Proc. of the Intl. Interconnect Technology Conf
Pub Type
Conferences

Download Paper

Local Download

Keywords

Electronic Materials, Nanostructured Materials, Reflectivity, Scattering, Thin Films, ellipsometric porosimetry, pore size, poresize distribution, porosity, porous low-k dielectric, positron annihilation lifetime spectrosc, small angle neutron scattering, x-ray reflectivity

Citation

Baklanov, M. , Kondoh, E. , Lin, E. , Gidley, D. , Lee, V. , Mogilnikov, K. and Sun, J. (2001), Comparative Study of Porous SOG Films with Different Non-Destructive Instrumentation, Proc. of the Intl. Interconnect Technology Conf, Undefined, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853742 (Accessed October 27, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 31, 2000, Updated October 12, 2021
Was this page helpful?