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Comparative Study of Porous SOG Films with Different Non-Destructive Instrumentation

Published

Author(s)

M R. Baklanov, E Kondoh, Eric K. Lin, D W. Gidley, V. J. Lee, K P. Mogilnikov, J N. Sun
Conference Location
Undefined
Conference Title
Proc. of the Intl. Interconnect Technology Conf

Keywords

Electronic Materials, Nanostructured Materials, Reflectivity, Scattering, Thin Films, ellipsometric porosimetry, pore size, poresize distribution, porosity, porous low-k dielectric, positron annihilation lifetime spectrosc, small angle neutron scattering, x-ray reflectivity

Citation

Baklanov, M. , Kondoh, E. , Lin, E. , Gidley, D. , Lee, V. , Mogilnikov, K. and Sun, J. (2001), Comparative Study of Porous SOG Films with Different Non-Destructive Instrumentation, Proc. of the Intl. Interconnect Technology Conf, Undefined, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853742 (Accessed October 15, 2025)

Issues

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Created December 31, 2000, Updated October 12, 2021
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