September 1, 2003
Author(s)
Ryna B. Marinenko, J T. Armstrong, Shirley Turner, Eric B. Steel, F A. Stevie
… for micro- and macroheterogeneity for use as primary standards for future characterization of SiGe thin films on … are needed by the microelectronics industry as reference standards. Specimens with nominal compositions of 14 and 6.5 … heterogeneity, homogeneity, micro-heterogeneity, reference standards, SiGe, Silicon-Germanium Technology …