Nanomanufacturing of Atom-Based Dimensional Standards - A Final Project Report of the NAMT

Published

January 1, 2002

Author(s)

Robert Allen, J J. Pellegrino, D Monk, E C. Teague, Dennis A. Swyt, Joseph Fu, Richard M. Silver, Theodore V. Vorburger, Bradley N. Damazo, Robert Russell, Thomas E. Wheatley, Keith A. Stouffer, Manfred Osti, David Wilmering, Richard L. Rhorer, Ram D. Sriram

Abstract

This report describes the accomplishments of the Nanomanufacturing of Atom-based Dimensional Standards Project, which operated as part of the National Advanced Manufacturing Testbed (NAMT) a program formally operating from fiscal year (FY) 1996 to FY 2000 to research a wide range of leading edge technologies for manufacturing. As part of the NAMT vision, the Nanomanufacturing of Atom-based Dimensional Standrds Project research the techniques to manufacture and use dimensional standards at subnanometer levels of uncertainly. Its main area of application is the microelectronics and data storage industries where in the future the critical dimensions of manufactured devices will grow continually smaller and where we anticipate that environments in which certain components are manufactured and used will become more specialized and exotic. This report discusses developemnts in atom-based step height standards, atom-based linewidth standards, a vacuum based artifact transport system, a portable data logger, design and communication processes, and teleobotics.

Citation

NIST Interagency/Internal Report (NISTIR) - 6850

Report Number

6850

NIST Pub Series

NIST Interagency/Internal Report (NISTIR)

Pub Type

NIST Pubs

Download Paper

https://doi.org/10.6028/NIST.IR.6850

Keywords

artifact transport, atom-based, collaborative design, data logger, dimensional standards, linewidcth, nanomanufacturing, step height, telerobotics

Citation

Allen, R. , Pellegrino, J. , Monk, D. , Teague, E. , Swyt, D. , Fu, J. , Silver, R. , Vorburger, T. , Damazo, B. , Russell, R. , Wheatley, T. , Stouffer, K. , Osti, M. , Wilmering, D. , Rhorer, R. and Sriram, R. (2002), Nanomanufacturing of Atom-Based Dimensional Standards - A Final Project Report of the NAMT, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.IR.6850 (Accessed December 4, 2024)