@misc{187066,
  author = {Robert Allen and J Pellegrino and D Monk and E Teague and Dennis Swyt and Joseph Fu and Richard Silver and Theodore Vorburger and Bradley Damazo and Robert Russell and Thomas Wheatley and Keith Stouffer and Manfred Osti and David Wilmering and Richard Rhorer and Ram Sriram},
  title = {Nanomanufacturing of Atom-Based Dimensional Standards - A Final Project Report of the NAMT},
  year = {2002},
  month = {2002-01-01},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.IR.6850},
  language = {en},
}