TY  - GEN
AU  - Robert Allen
AU  - J Pellegrino
AU  - D Monk
AU  - E Teague
AU  - Dennis Swyt
AU  - Joseph Fu
AU  - Richard Silver
AU  - Theodore Vorburger
AU  - Bradley Damazo
AU  - Robert Russell
AU  - Thomas Wheatley
AU  - Keith Stouffer
AU  - Manfred Osti
AU  - David Wilmering
AU  - Richard Rhorer
AU  - Ram Sriram
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2002-01-01
DO  - https://doi.org/10.6028/NIST.IR.6850
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2002
TI  - Nanomanufacturing of Atom-Based Dimensional Standards - A Final Project Report of the NAMT
ER  -