January 1, 1998
Author(s)
John A. Dagata, T Inoue, J Itoh, H Yokoyama
… A model for scanned probe microscope (SPM) silicon oxidation is presented. The model was derived from a … can be altered dramatically by modulating the applied oxidation voltage. … capacitance, elemental semiconductors, nanotechnology, oxidation, scanning probe microscopy, semiconductor process …