March 16, 2016
Author(s)
Lawrence H. Friedman, Igor Levin, Robert F. Cook
… (low-k) fins capped with stiff, compressively stressed TiN lines that provide the driving force for buckling. The … states are inferred. In particular, the stress state of TiN lines in three different systems is determined, along … methods, low-k dielectrics, interlayer dielectrics, TiN, stress, elasticity …