January 1, 1990
Author(s)
Lloyd J. Whitman, S Joyce, J Yarmoff, F McFeeley, L Terminello
The chemisorption of SiCl 4, Si 2Cl 6, and chlorine on Si(111)7x7 has been characterixed using soft X-ray photoemission with synchrotron radiation, thermal desorption spectroscopy, and Auger electron spectroscopy. SiCl 4 dissociatively chemisorbs on room