July 1, 1999
Author(s)
E Handy, M V. Rao, K A. Jones, M A. Derenge, P Chi, R D. Vispute, T Venkatesan, N A. Papanicolaou, J Mittereder
… arsenic (As), antimony (Sb), aluminum (Al), and boron (B) ion-implanted 6H-SiC. Atomic force microscopy (AFM) has … for annealing cycles up to 1600 C for 15 min. Secondary ion mass spectrometry measurements indicated that the AlN … AFM, AlN encapsulate, diffusion, ion implantation, silicon carbide, SIMS …